MEMS 0.5mm Movement Free Space Attenuator/Shutter Chip
The etMEMS™series of free space variable optic attenuator (FS-VOA) is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The etMEMS™ series of FS-VOA is designed to completely block a collimated light beam <= 500 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.
The different movement FS-VOA chip up to 700um is available, please contact us.