MEMS 0.3mm Movement Free Space Attenuator/Shutter With Mount

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The MEMS series FS VOA is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The MEMS series FS VOA is designed to completely block a collimated light beam over 300 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser systems.
It is available in either normally-open or normally-closed configurations.

  • Compact
  • High Reliability
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS Series VOA/Shutter Min Typical Max Unit
Attenuation Resolution Continuous
Shutter Movement 300 mm
Response Time 20 60 ms
Optical Power Handling 400 mW
Driving Voltage[1] 3.3 4 V
Device Resistance 60 [2] 95 Ohm
Power Consumption 150 210 mW
Resonant Frequency 1000 Hz
Operating Temperature -5 75 oC
Storage Temperature -40 85 oC
Reliability           Telcordia 1209 and 1221
Package Dimension See drawing below mm
[1].   For full dynamic range.
[2].    At voltage 3.3V.
P/N: N/A