MEMS 0.7mm Movement Free Space Attenuator/Shutter With Mount

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The etMEMS™ series of free space variable optical attenuator (FS-VOA) is based on a proprietary patent pending micro-electro-mechanical mechanism featuring exceptionally compact size with large shutter movement, simple construction, and easy direct drive. The FS-VOA is designed to completely block a collimated light beam over 700 mm in diameter and be operated in air without the need for hermetic seal and is fully compliant with the Telcordia 1209 and 1221 reliability standards. The device is ideally suited to be integrated into laser and receiver systems.

It is available in either normally-open or normally-closed configurations.

  • Compact
  • High Reliability
  • Direct drive
  • Low IL, PDL, WDL & TDL
  • Intrinsic tolerance to ESD
  • Power Control
  • Power Regulate
  • Channel Balance
  • Instrumentation


FS-VOA/Shutter Min Typical Max Unit
Attenuation Resolution Continuous
Aperture Diameter 750 mm
Response Time [1] 40 75 ms
Optical Power Handling 500 mW
Driving Voltage [2] 4 5 V
Device Resistance 100 [3] ohm
Power Consumption 210 mW
Resonant Frequency 250 310 Hz
Operating Temperature -5 75 oC
Storage Temperature -40 85 oC
Reliability           Telcordia 1209 and 1221
Package Dimension See drawing below mm
[1].    For any desired attenuation. 50ms time constant of control signal is recommended to eliminate the low frequency resonance ≤ 200 Hz. Please refer to Agiltron’s design of driving circuit to eliminate the low freqeuncy resonance.
[2].     For full attenuation.
[3].     At voltage 4V.
P/N: N/A